Film bulk acoustic resonator based gas sensor: A sensitive detector for gas chromatography

摘要

This paper reported a miniaturized sensitive gravimetric gas sensor based on film bulk acoustic resonator (FBAR). The sensitivity of the FBAR gas sensor was enhanced 10~20 times after coating with nanomaterials (metal organic frameworks (MOFs)). A facile coating process of MOFs on FBARs was disclosed for the first time. Furthermore, utilizing FBAR sensors as detectors was firstly demonstrated in a prototype of chromatographic instrument by facile hyphenation of FBAR with commercial separation column.