Coplanar differential capacitively coupled contactless conductivity detection (CD-C4D) sensor for micro object inside fluidic flow recognization

摘要

In this paper, we present a coplanar differential capacitively coupled contactless conductivity detection (CD-C4D) structure for the detection of tiny objects with dimension in micro scale. The differential capacitance changed due to the occurrence of an object in micro scale in is detected and used to recognize the presence as well as properties (i.e., electrical property and moving speed) of the object in fluidic flow. The experimental results and discussion in this paper can be generalized to any living cell or particle detection applications.