MEMS-based sample carriers for simultaneous heating and biasing experiments: A platform for in-situ TEM analysis

摘要

We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.