A current-integration-based CMOS amperometric sensor with 1.2 μm × 2.05 μm electroless-plated microelectrode array for high-sensitivity bacteria counting

摘要

A current-integration-based CMOS amperometric sensor with a bacteria-sized (1.2 μm × 2.05 μm) electroless-plated microelectrode array for high-sensitivity bacteria counting is presented. For high-sensitivity bacteria counting with sufficient SNR, noise must be reduced because the bacteria-sized microelectrode can handle only small current on the order of nA. The proposed current integration can reduce noise associated with the CMOS sensor. Measurement results with a 0.6-μm test chip demonstrate successful high-sensitivity 2D direct counting of microbeads with 27 dB SNR.