Modelling and design of Micro-Opto-Mechanical Pressure Sensors in the presence of residual stresses

摘要

This paper presents the modelling of a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform. Implemented using a single wavelength Mach Zehnder Interferometer (MZI), it relies on a single readout detector that could be integrated directly on CMOS. Current photonic processes exhibit high residual stresses in the sensitive membrane. In this paper we will focus the analytical model taking the residual stresses in the membrane and the losses in the optical circuit into account. Compressive stress will be considered and the analytical model will be compared with experimental measurements.