Mechanical simulation of 3-axis accelerometer using a single proof-mass

摘要

In this paper we present the design of 3-axis accelerometer that consists of one proof-mass. It is a combination of classical comb-drive and flat electrode accelerometers. The suspension of such sensor was designed to allow the measurement in all axes. The 3D model was built and analyzed in Comsol. Mechanical behavior of the sensor was investigated and basic parameters were extracted such as eigenfrequency and the deflection in all axes under the acceleration up to 8 g. Moreover, cross-axis deflection was calculated.