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The Development of Extreme Ultraviolet / Soft X-Ray Optical System at SKLAO

机译:SKLAO的极紫外/软X射线光学系统的开发

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An overview of recent development of the extreme ultraviolet (EUV)/soft X-ray optical system at SKLAO was presented. The testing and fabrication of aspheric mirrors, EUV/soft X-ray multilayer films, semi-kinematic mount, six-DOF precise adjustment platform, optical system alignment based on our homemade point diffraction interferometer (PDI) are discussed.
机译:介绍了SKLAO的极紫外(EUV)/软X射线光学系统的最新发展概况。讨论了非球面镜,EUV /软X射线多层膜,半运动学安装,六自由度精确调整平台,基于我们自制的点衍射干涉仪(PDI)的光学系统对准的测试和制造。

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