A nafion coated capacitive humidity sensor on a flexible PET substrate

摘要

This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.