Flexure mechanisms become more and more popular because of their better performance, easy maintenance, wear-free properties and predictability of kinematic variables changes. Comparing to traditional ball bearings or linear slides, however, range of motion limits flexure mechanisms applications in existing market. This paper presents the design of a novel planar XY stage synthesizing the benefits of parallel and serial kinematic constraint. By parallel connecting two mechanisms: the vertical and horizontal subsystems, which both have degrees offree-dom(DOFs) in primary moving direction but different degrees of constraints(DOCs) in rotation , this system is able to reduce three parasitic rotation angles(pitch ,roll and yaw) less than one micro radium and also have motion range up to 40mm x 40mm. Analytical model and finite element analysis(FEA) are present to validate the performance of this stage and also determine appropriate operation parameters.
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机译：挠曲机构由于其更好的性能，易于维护，无磨损的特性以及运动学变量变化的可预测性而变得越来越受欢迎。但是，与传统的球轴承或线性滑块相比，运动范围限制了挠曲机构在现有市场中的应用。本文提出了一种新颖的平面XY平台的设计，该平台综合了并行和串行运动学约束的优点。通过并行连接两个机制：垂直和水平子系统，它们在主运动方向上都具有自由度（DOF），但在旋转中具有不同的约束度（DOC），因此该系统能够减少三个寄生旋转角（pitch，滚动和偏航）小于一微米的镭，并且运动范围可达40mm x 40mm。存在分析模型和有限元分析（FEA）以验证该阶段的性能并确定适当的操作参数。
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