METHOD AND DEVICE FOR CORRECTING POSITION OF XY STAGE, AND FOR POSITIONING USING THE SAME

摘要

PROBLEM TO BE SOLVED: To realize a high level of accuracy in positioning for laser machining without increasing price of a device.;SOLUTION: When a pattern arranges a reference mask 30 formed regularly on an XY stage 10 in advance, and the position of the XY stage is corrected based on a coordinate value acquired by photographing positions of respective patterns 32 with a camera 44, scales 20X, 20Y for measuring of a position of the XY stage are corrected by a laser measuring length, the positions of patterns arranged on prescribed lines of the reference mask 30 are obtained based on the scale for the XY stage corrected by the laser measuring length as a reference, and the coordinate value is corrected based on a scale measured value after the correction.;COPYRIGHT: (C)2003,JPO