MECHANICAL DESIGN OF A SAMPLE MANIPULATOR FOR X-RAY COHERENT SURFACE SCATTERING IMAGING WITH FLEXURE STAGES FOR 10-NM-SCALE AND 10-NRAD-SCALE POSITIONING

摘要

The Advanced Photon Source (APS) at Argonne National Laboratory (ANL) is a national user facility for synchrotron radiation research. The APS Upgrade's massive increase in coherence will particularly benefit several specific types of x-ray science techniques, including coherent x-ray surface scattering imaging. The development of coherent surface scattering imaging in grazing-incidence geometry takes advantage of enhanced x-ray surface scattering and interference near total external reflection. It is promising wide applications in elucidating structures in substrate-supported and buried 3D nanopatterns, nanoelectronics, and photonics. However, an extremely stable sample manipulator with ultra-high positioning resolution is needed for this new x-ray technique. In addition, a 100-nm-level sphere of confusion of the rotation stages is required. Therefore reproducible rotations are critical for correcting the eccentric motion possibly introduced by the stages.