Study of interdigitated electrode sensor for lab-on-chip applications

摘要

In this paper, interdigitated electrodes (IDEs) are studied. IDEs are one of the most popular transducers, widely employed in various technological and analytical applications, especially in the field of biological and chemical sensors due to their low cost, ease of fabrication process and excellent sensitivity. The increasing demand for lab-on-chip (LoC) devices and for designing miniaturized sensors, it becomes essential to utilize of such transducers. In the current study, MEMS module of Comsol multiphysics software is used for the simulation of IDE sensor. The dependence of the IDE capacitance on the geometric parameters including IDE finger spacing, thickness, width, sensor spatial wavelength and sensitive layer thickness are discussed.