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study on breakdown characteristics of A1GaN/GaN-based HFETs

机译:A1GaN / GaN基HFET的击穿特性研究

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GaN-based devices are gaining popularity due to its high electrical performance and are widely used in high frequency and high power microwave applications. Unfortunately, there are limitations faced by HFETs which are current leakage and breakdown characteristics which affect the performance of the device. This work focuses on the investigation of geometrical and process variation impact on the electrical characteristics and breakdown voltage of the AlGaN/GaN based High Field Effect Transistor (HFET). The Sentaurus Technology Computer Aided Design (TCAD) by Synopsys was used to facilitate this study on the electronics properties of the HFET specifically the current density in the two-dimensional electron gas (2DEG) channel, carrier mobility, band energy and transfer characteristics. It has been observed that process variations specifically substrate material selection have significant impact on the performance of the HFET as compared to geometric variation. HFETs with the Silicon Carbide substrate demonstrate higher breakdown voltage as compared to the conventional silicon substrate. Optimization of the conventional structure by means of introducing silicon carbide as the substrate demonstrates an increase of 183.33% in terms of breakdown voltage.
机译:由于其高电性能,基于GaN的设备正在获得普及,并且广泛用于高频和高功率微波应用。不幸的是,HFET面临的限制是电流泄漏和击穿特性,影响器件性能。这项工作侧重于对基于AlGaN / GaN的高场效应晶体管(HFET)的电气特性和击穿电压的研究。 Sypopsys的Sentaurus技术计算机辅助设计(TCAD)用于促进本研究HFET的电子特性,具体地是二维电子气体(2deg)通道中的电流密度,载流子迁移率,带能量和传递特性。已经观察到,与几何变化相比,工艺变化特别是基底材料选择对HFET的性能产生显着影响。与常规硅衬底相比,具有碳化硅基板的HFET表现出更高的击穿电压。通过引入碳化硅作为基板的碳化硅优化常规结构在击穿电压方面表现出183.33±%的增加。

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