Damage effect of helium ion on solid sample during observation through HIM

摘要

In the usage of the field of observation using field ion microscope, researches are mainly focusing on the performance of the scope. Although ion beams can be also used as beam cutters in the industry [1], not many works address the question of whether the field ion microscope can how much damage an observation object. In this paper, we are using a certified accurate model in an ion shooting simulation software SRIM to verified various damage events created by helium ion beams with a certain level of energy, which will be set to the normal working load on an existing helium ion microscope, shooting on a coated material. [2] By analyzing the damage events brought by the high energy workload helium ion beam, we expect that we can approach a main trends that show how much damage an observation object would have under a normal helium ion microscope.