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A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding

机译:使用微吹焊和焊接形成的高q全熔石英固态茎玻璃半球形谐振器

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We report a new fabrication technology for making fused silica (FS) wineglass resonators with arbitrarily sized FS solid stems through a simultaneous process of micro blow-torching and microwelding. The process allows the welding of multiple FS structures at controlled locations during blow torching. We demonstrate a new micro FS wineglass resonator with high quality factor (Q) and long ring down time (τ). The resonator is formed by blow torching and flowing a thin FS substrate using vacuum to form the resonator shell, and by welding the shell to a solid post at a controlled location. The flowing of the shell and welding to the rod is performed in one step and in a single mold. This solid-stem resonator offers low anchor loss due to the large stem length/stiffness, and small shell rim thickness. The device has a shell radius/height of ~2.8 mm, and a stem radius of 0.5 mm. At <;10 μTorr vacuum, the n=2 wineglass mode, located at a frequency (f) of 22.6 kHz, has σ = 35.9 s and Q = 2.55 million.
机译:我们报告了一种新的制造技术,该技术通过同时进行微吹焊和微焊接工艺来制造具有任意尺寸的FS实心茎的熔融石英(FS)酒杯谐振器。该过程允许在吹焊期间在受控位置焊接多个FS结构。我们演示了一种新的微型FS酒杯谐振器,该谐振器具有高品质因数(Q)和长振铃时间(τ)。谐振器是通过吹焊和使用真空使薄的FS基板流动以形成谐振器外壳,以及将外壳焊接到受控位置的实心柱上而形成的。壳体的流动和对杆的焊接是在一个步骤中和在一个模具中进行的。由于具有较大的杆长/刚度和较小的壳体边缘厚度,因此该实心杆谐振器具有较低的锚固损耗。该设备的外壳半径/高度为〜2.8毫米,杆半径为0.5毫米。在小于等于10μTorr的真空下,位于频率(f)为22.6 kHz的n = 2酒杯模式具有σ= 35.9 s和Q = 255万。

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