Determination of iodide in clean room air by ion chromatography

摘要

A case study of Iodine-containing induced Cu layer corrosion was reported in the paper. The iodine was believed to be from environmental air and reacted with Cu layer to cause delamination. Ion chromatography analysis method was developed to analyze the iodide levels in the clean room air and the air after Facility Make-up Air Unit. The developed method successfully helped to locate the source of the corrosive iodide and effectively monitor clean room air quality.