A high fill factor 1×20 MEMS mirror array based on ISC bimorph structure

摘要

In this paper, an electro-thermal-actuated 1×20 MEMS mirror array is designed, fabricated and tested. 20 mirrors are arranged with narrow gaps, an area filled factor 96% is reached. Each mirror is actuated by four independent bimorph actuators aiming to control 2D tilting. Here, a cross-talk is done to reduce thermal cross-talk by downward bimorph structure into a silicon cavity. the result shows that there is a thermal cross-talk about 5%.