Broadband Mid-Infrared Silicon-on-Insulator Waveguide Devices

摘要

We demonstrate SOI waveguide with low propagation and bending loss of 2dB/cm and 0.02dB/90° in the broad mid-infrared range of 3.68-3.88μm. By theoretically analyzing loss mechanisms, we indicate SOI waveguide's intrinsic limitation for mid-infrared application.