A closed-loop accelerometer based on electrostatic pull-in time is presented here. The main goal is to achieve high-performance, namely in respect to noise and sensitivity, with a very simple readout mechanism. An integrated system was implemented comprising actuation and readout circuitry, FPGA and MEMS sensor. It presents a good performance in comparison to the state-of-the-art. Experimental measurements have shown a sensitivity of 61.3 V/g, dynamic range of 110 dB and a noise level set below 3 µg/√Hz, by the mechanical-thermal noise only. The measured bias stability is better than ±250µg over 48h with temperature control of ±1°C.
展开▼
机译：本文介绍了一种基于静电吸合时间的闭环加速度计。主要目标是通过非常简单的读出机制来实现高性能，即在噪声和灵敏度方面。实现了包括致动和读出电路，FPGA和MEMS传感器的集成系统。与最新技术相比，它具有良好的性能。实验测量表明，仅由于机械热噪声，灵敏度为61.3 V / g，动态范围为110 dB，噪声水平设置为低于3 µg /√Hz。在±1°C的温度控制下，在48小时内测得的偏压稳定性优于±250µg。
展开▼
