2D silicon nanopillars arrays for photonics

机译：用于光子学的2D硅纳米柱阵列

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In this paper, particularities of ordered silicon nanopillars (Si NP) arrays formation by mean electron beam lithography and dry etching were studied. The optical and electrical properties of the Si NPs were investigated.

机译：本文研究了通过平均电子束光刻和干法刻蚀形成有序硅纳米柱（Si NP）阵列的特殊性。研究了硅纳米颗粒的光学和电学性质。

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《International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices》|2015年|20-23|共4页
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Golobokova Lyudmila S.; Nastaushev Yuri V.; Dultsev Fedor N.; Kryzhanovskaya Natalia V.;
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electron beam lithography; nanophotonics; silicon nanopillars;

机译：电子束光刻;纳米光子学;硅纳米柱;

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专利

1. Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography [J] . Wei Li, Ling Xu, Wei-Ming Zhao, Applied Surface Science . 2007,第22期

机译：使用改进的纳米球光刻技术制造用于二维纳米模具的大规模周期性硅纳米柱阵列
2. Luminescent ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells [J] . Dong Wang, Sven Schoenherr, Song Du, Materials Letters . 2013,第maya1期

机译：纳米多孔硅纳米柱和具有纳米多孔壳的硅纳米柱的发光有序阵列
3. Fabrication of ordered arrays of ordered arrays of silicon nanopillars in silicon-on-insulator wafers [J] . A.Wellner, P.R.Preece, J.C.Fowler Microelectronic Engineering . 2001,第期

机译：绝缘体上硅晶圆中硅纳米柱有序阵列的有序阵列的制作
4. 2D silicon nanopillars arrays for photonics [C] . Golobokova Lyudmila S., Nastaushev Yuri V., Dultsev Fedor N., International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices . 2015

机译：图2D硅纳米玻璃器阵列为光子
5. Selected Applications of Silicon Nanopillar Arrays [D] . Mousavi, Behnam Kheyraddini. 2018

机译：硅纳米柱阵列的精选应用
6. Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells [O] . Dong Wang, Ran Ji, Song Du, 2013

机译：纳米多孔硅纳米柱和具有纳米多孔壳的硅纳米柱的有序阵列
7. 2D MoS2 Encapsulated Silicon Nanopillar Array with High-Performance Light Trapping Obtained by Direct CVD Process [O] . Minyu Bai, Zhuoman Wang, Jijie Zhao, 2021

机译：2D MOS2封装硅纳米池阵列，具有通过直接CVD工艺获得的高性能光捕获

2D silicon nanopillars arrays for photonics

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