Fabrication of high density vertical Germanium photodiodes (PDs) on top of 200 mm CMOS wafers coming from an external foundry is discussed. Optical performances of stand-alone PDs are compared lo those of CMOS-coupled PDs.
展开▼
机译:讨论了在来自外部铸造厂的200 mm CMOS晶圆上制造高密度垂直锗光电二极管(PD)的过程。比较了独立PD的光学性能和CMOS耦合PD的光学性能。
展开▼