Ion beam nanofabrication for mass production of nanotweezers based on new composite functional material with shape memory

摘要

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modern products are becoming smaller and smaller. The applicability of the standard lithographic technologies to processing the new functional materials is crucial for their successful wide implementation in practice. Recently we have reported experimental design and test of the new generation for nano-mecanical devices like nano-tweezers based on original bilayer TiNiCu/Pt composite structures. In the present paper it is demonstrated that standard ion beam nano-fabrication technology is quit suitable for full cycle of production operational stages of practical nano-tweezers production. The technological experiments were done on realizing by usage of a novel focused ion beam instrument Raith ionLiNE? device. This device is a novel focused ion beam instrument for low dose nanolithography and nano-fabrication. ionLiNE? Raith was applied for experimental composite nano-tweezers production on the base of TiNiCu/W with length - 30 μm, gap width 0.9 μ. The tests showed high quality of reproduction and long term operation under thermal control at temperature change only 14 K.