Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling

摘要

A novel 6-DOF precision positioning system is designed in this paper, which is assembled by two type 3-DOF precision positioning stages. Each stage is driven by three piezoelectric actuators (PEAs), and guided by three symmetric T-shape hinges and three elliptical flexible hinges, respectively. The kinematics of this 6-DOF system are investigated. According to an effective kinematic model, the transformation matrix are obtained, which provides a useful tool to predict an output displacement. In addition, the dynamic model of the 6-DOF system is established. The PEAs can be treated as a force generator with a built-in spring-damper component. Furthermore, the characteristics of the 6-DOF system are evaluated in this paper by the FEM simulation. The design structure provides the high dynamic bandwidth. Meanwhile, the experiment is performed to verify the 6-DOF stage has a good characteristic.