The analysis of the effect on the moth-eye antireflection microstructure shape error

摘要

Through the rigorous coupled wave theory (RCWA), the shape error antireflective moth-eye cycle microstructure is studied, as well as the three characteristic parameters( period, groove height and wavelength) of the conical moth-eye antireflection microstructures groove are analyzed. By the simulation Matlab software, it is found that the grating period are 2.2μm and 1.4μm and the highest and minimum reflectivity of the microstructure are about 2.4% and 0.2% respectively. Simultaneously, as the period, wavelength and refractive index are decided, the groove height is much higher while the reflectivity will be much lower. In addition, different wavelengths gain the different reflectivity. The study of the three characteristic parameters is too useful to design and manufacture the moth-eye antireflection microstructures. Also the applicability of the rigorous coupled-wave theory is studied in this paper.