Design of multi-state actuator for mm-wave reconfigurable front-end circuits using CMOS-MEMS technologies

摘要

Reconfigurability in mm-wave circuits and systems become desired in recent years. In this work, the parallel-beam driven actuator is modified in two ways to enhance the tuning capability. In cooperated with the proposed actuator, two V-band frequency-tunable front-end circuits are demonstrated. The bandstop filter is fabricated in 0.35-µm CMOS-MEMS process, providing five-band switching within 51–63.6 GHz with band rejection > 20 dB. The slot antenna in 0.18-µm CMOS-MEMS shows seven-band switching from 46.6 to 56 GHz with the antenna gain > −15.6 dBi. The measurements present a good agreement with simulated results.