Structure of ceramic substrates of microwave hybrid integrated circuits modified by laser radiation

摘要

Study results for a near-surface layer of aluminum oxide ceramics substrates for microwave hybrid IC's (MHIC's) are presented. Layers are produced by treatment of laser beam (1.06 μm wavelength) exposure - laser treatment. It is shown that there is a formation of a texture of chevron type and non-stoichiometric surface layer towards the lack of oxygen, as well as an increase of coefficient of fracture toughness for 6% after laser treatment and melting.