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Study on Corrosion Failure Mechanism of Ceramic Optocoupler Under Thermal Stress

机译:热应力下陶瓷光耦合器腐蚀失效机理研究

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The scope of this paper is to study on corrosion failure mechanism of ceramic optocoupler under thermal stress. With this regard, a failure case for current transfer ratio (CTR) deviates is analyzed. Scanning electron microscopy (SEM) and energy dispersive X-ray microanalysis (EDX) are used to detect the failure position. The SEM study revealed that the passivation layer is the critical factor of chip corrosion by blocking the impurity ions and water vapor into the chip. To find out the weakness of ceramic optocoupler, ANSYS method is used to analyze distribution of internal thermal stress and deformation of material. According to thermal analysis results, the deformation on the passivation layer is higher than surrounding material. Then the failure mechanism of CTR reduction was analyzed. When the passivation layer was destroyed, both SO_2 and vapor in the air entered into device, resulting in corrosion of A1 electrode. By studying optocoupler's failure mechanism, the factors that are affecting the performance electrical parameters under thermal stress for optocouplers are identified.
机译:本文的范围是在热应力下研究陶瓷光耦合器的腐蚀失效机理。通过这方面,分析了用于电流转移比(CTR)偏离的故障情况。扫描电子显微镜(SEM)和能量分散X射线微分析(EDX)用于检测故障位置。 SEM的研究表明,钝化层是通过将杂质离子和水蒸气阻挡到芯片中来芯片腐蚀的临界因素。为了找出陶瓷光耦合器的弱点,ANSYS方法用于分析内部热应力和材料变形的分布。根据热分析结果,钝化层上的变形高于周围材料。然后分析了CTR减少的失效机制。当钝化层被破坏时,在进入装置的空气中的SO_2和蒸汽均导致A1电极的腐蚀。通过研究光耦合器的故障机制,鉴定了影响用于光耦合器的热应力下的性能电参数的因素。

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