Microfluidic injector simulation with SAW sensor for 3D integration

摘要

The possible creation of efficient liquid sensors on the nozzle is presented. The proposed surface acoustic wave (SAW) device utilizing Aluminum Nitride (AlN) single crystal as the piezoelectric substrate is based on the pressure variation due to the continuous droplet ejector. The design, specification and numerical simulation results are described. Output response results demonstrating the efficiency and scalability of the method have been presented. This 3D integrated system has a number of advantages, such as sensitivity to droplet pressure in the nozzle. It is able to detect the start of the droplet formation process and is compatible with CMOS fabrication technology leading to an inexpensive and reliable system. The droplet generation process begins at an output voltage of roughly 0.074 V and the background level of the attenuation of both mechanical and electrical energy. Using a 3D model, the combination capacity between inkjet printer and piezoelectric and electrical-mechanical stability was verified.