Integrating nanopore sensors in multiple microfluidic channel arrays using controlled breakdown

摘要

Problem to be solved: to provide a device for fabricating nanopore array by controlled breakdown.An apparatus for fabricating a nanopore on a film comprising a dielectric layerA common substrate 4 is formed on the exposed surface of the first substrateDisposed on the exposed surface;Support 16 configured to hold membrane 12A second substrate 15 having one or more microfluidic channels 5 formed on the inner surfaceA second substrate disposed on the support such that said inner surface faces opposite said support such that said one or more microfluidic channels is fluidly separated from said microchannel commonly used by said membraneA reference electrode disposed on one side of the membraneWith two or more additional electrodes disposed opposite the membraneA set of electrodes includingEquipped withThe set of electrodesA potential difference is generated on both sides of the filmThe two or more additional electrodes areThe above described electric field of the entire film is disposed so as to be uniform.Diagram