The Effects of Thermal Field in Interferometric Measurements of Radius of Curvature

摘要

The radius of curvature is one of the most important parameters to determine the properties of spherical surfaces. Based on the interferometric method, the importance of thermal analysis of spherical optical elements is stated in the paper. And then using different material, such as K9 and fused silica, the change of the curvature radius of spherical elements in different static temperature field is calculated and analyzed theoretically in the change of sag and surface. Finally, the theoretic results and simulated results by ANSYS have been compared. It is found that the radius of curvature of spherical optical elements is not only connected with the magnitude and direction of the temperature gradient, but also directly connected with material and structural parameters.