Optical properties of thermally evaporated ultra-thin Al, Ag and Cu films

摘要

In this article, ultra-thin Al, Ag, Cu thin films with thickness d～10nm are prepared by thermal evaporation, Ellipsometer and Spectrophotometer are used to measure Ψ, Δ, R and T of samples. Based on the characteristics of different metal materials, we choose proper physical model to analysis the dielectric function. Experimental results show that the method of Ellipsometer with transmittance data fitting can describe optical constants of ultra-thin metal films, and all the parameters of Ψ, Δ and T show a good fitting result. Moreover, the reflection of samples simulated by MathCAD software using Fresnel coefficient equations also follows the measured reflectance data.