CMOS integrated circuits; catalysis; catalysts; chemical variables measurement; free energy; gas sensors; iron compounds; magnetic materials; manganese compounds; microfabrication; microsensors; sol-gel processing; solenoids; tin compounds; CMOS process; CMOS-MEMS gas sensor fabrication; Eyric equation; Gibbs free energy; SnOsub2/sub-Fesub3/subOsub4/sub; SnOsub3/sub-Mnsub3/subOsub4/sub; chemical reaction rate; donut-shaped stacked electrodes; gas chamber; gas concentration measurement; heating method; magnetic catalysis technique; magnetic catalytic sensing material; magnetic field; sensitivity enhancement; size 0.35 mum; sol-gel solution; solenoidal coils; Electrodes; Gas detectors; Magnetic field measurement; Magnetic fields; Materials; Sensitivity; CMOS-MEMS; Gas sensor; Magnetic-Catalyst; Mninf3/infOinf4/inf; SnOinf2/inf;
机译:高灵敏磁催化CMOS-MEMS兼容气体传感器的研究
机译:使用传感材料和结构设计来提高CMOS-MEMS热电红外传感器的性能
机译:用于气体传感的CMOS-MEMS谐振器中嵌入式微加热器和温度传感器的特性
机译:CMOS-MEMS气体传感器新型磁性催化传感材料的研究
机译:电容式CMOS-MEMS惯性传感器的传感和控制电子设计。
机译:基于有损模式共振和传感材料的光纤气体传感器:全面审查
机译:过程诱导的应力和氢对单片集成CMOS-MEMS微双材料悬臂梁传感器阵列的影响