On-Glass Integration of Thin Film Devices for Monitoring of Cell Bioluminescence

摘要

This paper reports the development of a miniaturized lab-on-glass,suitable for the on-chip detection of living cell bioluminescence and their on-chip thermal treatments. The glass substrate hosts, on one side, hydrogenated amorphous silicon diodes, working as both temperature sensors and photosensors, and, on the other side, transparent thin films acting as heating sources. The main challenge of the work is the determination of the correct fabrication recipes in order to satisfy the compatibility of different microelectronic steps. The measured uniformity of temperature distribution, sensitivity of the temperature sensors, reverse dark current and spectral response of the photosensors demonstrate the successful technological integration and the suitability of the developed lab-on-glass to control the cell temperature and detect the BL emission with high sensitivity.