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Hybrid integration of silicon nanophotonics with 40nm-CMOS VLSI drivers and receivers

机译:用40nm-CMOS VLSI驱动器和接收器的硅纳米级晶体杂交融合

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Oracle's scalable hybrid integration technology platform enables continuing improvements in performance and energy efficiency of photonic bridge chips by leveraging advanced CMOS technologies with maximum flexibility, which is critical for developing ultralow power high-performance photonic interconnects for future computing systems. Herein, we report on our second generation of photonic bridge chips comprising electronic drivers and receivers built in 40 nm bulk CMOS technology attached to nanophotonic devices, fabricated using SOI-photonic and 130 nm SOI-CMOS photonic technologies. Hybrid integration by flip-chip bonding is enabled by microsolder bump interconnects scaled down from our previous generation effort and fabricated on singulated dies by a novel batch processing technique based on component embedding. Generation-on-generation, the hybrid integrated Tx and Rx bridge chips achieved 2.3× and 1.7× improvement in energy efficiency, respectively, while operating at 2× the datarate (10 Gbps).
机译:Oracle可扩展的混合集成技术平台可以通过利用高级CMOS技术实现最大灵活性的高级CMOS技术继续提高光子桥芯片的性能和能效,这对于为未来计算系统开发超级电力高性能光子互连至关重要。在此,我们报告了我们的第二代光子桥芯片,其包括内置于40nm批量CMOS技术的电子驱动器和接收器,其连接到纳米光子器件,使用SOI-光子和130nm SOI-CMOS光子技术制造。通过倒装芯片键合的混合集成通过从我们之前的一代努力缩小并通过基于组件嵌入的新型批处理技术进行了从我们之前的一代努力进行缩小并在单一的模具上制造的混合集成。一代发电,混合集成TX和RX桥芯片实现了2.3× 1.7×在2&#X00D7运行时分别改善能效,同时在2&#x00d7运行; Datarate(10 Gbps)。

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