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Liquid crystal and Infrared Thermography on coated SAW devices

机译:镀膜SAW器件上的液晶和红外热成像

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Reliability of micro-electronic devices is one of the most important issues in mobile communication systems and is significantly influenced by the thermal behavior of the components. The present contribution demonstrates Liquid Crystal Thermography (LCT) and Infrared Thermography (IRT) in exemplary investigations of self-heating effects in a half-section ladder-type Surface Acoustic Wave (SAW) filter with thick SiO2 coating. Conventionally, mean temperature values are obtained indirectly by evaluating measured frequency shifts under load using the Temperature Coefficient of Frequency (TCF). In contrast to TCF based evaluations, LCT and IRT provide spatially resolved measurements of the temperature distribution on the component and serve as an independent and direct scheme for thermal characterizations. The results of LCT and IRT measurements are compared with simulations of the temperature distribution and show good agreement.
机译:微电子设备的可靠性是移动通信系统中最重要的问题之一,并且受组件的热性能的影响很大。本贡献在具有厚SiO2涂层的半截面梯型表面声波(SAW)过滤器中对自热效应的示例性研究中证明了液晶热成像(LCT)和红外热成像(IRT)。常规上,平均温度值是通过使用频率温度系数(TCF)评估负载下测得的频移间接获得的。与基于TCF的评估相反,LCT和IRT提供了组件上温度分布的空间解析测量结果,并用作热特性的独立直接方案。 LCT和IRT测量的结果与温度分布的模拟进行了比较,并显示出良好的一致性。

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