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Wafer-scale inspection of graphene conductivity by THz near-field scanning: As-grown on sapphire and after transfer to SiO2/Si

机译:THz近场扫描的石墨烯电导率的晶圆级检查:在蓝宝石上生长,转移到SiO2 / Si后

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摘要

We present THz near-field transmission measurements for CVD-grown 2″ graphene mono-layer on sapphire before and after transfer to SiO2/Si substrate. The capability to detect changes in the graphene electronic properties after the transfer reveal the potential of THz-measurements as a non-destructive inspection tool for large scale samples with micron-scale resolution.
机译:在转移到SiO之后,我们向Sapphire上的CVD生长2“石墨烯单层为CVD-生长的2”石墨烯单层提供THz近场传输测量 2 / Si衬底。转移后,检测石墨烯电子性能变化的能力揭示了THZ测量的电位作为具有微米级分辨率的大型样品的非破坏性检查工具。

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