Influence of the organic vehicle and inorganic additives on the properties of thick film pastes for AlN

摘要

New conductor pastes for AlN as substrate material with fired films of a sheet resistance below25 mOhm/sq were investigated. The pastes consist of AgPd as conductive phase for leach resistance. Otherpaste ingredients are glasses of matched composition for adhesion and densification properties, littleamounts of inorganic additives and organic vehicles for film deposition. The latter has a significantinfluence on the paste deposition and the resulting film properties as well. In order to shine light into theserelationship systematic rheological studies of the organic vehicle and the manufactured pastes wereperformed. The rheological investigations include measurements in rheological steady-state as well asdynamic experiments. In addition, the solder properties of the fired film were studied. FESEM analyseswere performed on the surface of the fired films.