Micromachined hybrid integrated receiver modules for 38 GHz and 77 GHz, on silicon substrate, technology and manufacturing

摘要

This paper present the fabrication process for the manufacturing of hybrid integrated receiver modules for 38GHz and 77GHz operating frequency, on micromachined silicon substrate. The hybrid receiver structures consists in a membrane-supported antenna as well as a GaAs Schottky detector diode, a matching network and a low-pass filter on a bulk material area of the chip. The technological process as well as the manufacturing characteristics are presented. AFM, SEM, and White Light Interferometry have been used for microphysical characterization.