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FABRICATION OF AN ELECTRO-THERMAL MICRO GRIPPER USING SILVER-NICKEL INK

机译:使用银镍油墨制造电热微夹钳

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This paper reports a miniaturized electro-thermal gripper with a novel fabrication process applying composite silver-nickel ink. Compared to state of the art, a thick resistive structure is dispensed on a silicon wafer by an injecting machine, which will decrease the fabrication process complexity. Device size, driving power and deformation of the gripper could be further improved by stacking multi-layers of silver-nickel structures. In the paper, the electrical and mechanical behaviors of the micro-grippers are well characterized. The displacement of each arm is observed to be 310.6 μm for the applied current of 0.26 A. The maximum power dissipation is 400 mW for the actuators. The fabricated micro gripper can grip a small ball with a diameter of 1.3 mm.
机译:本文报道了一种小型化电热夹钳,具有施加复合银镍油墨的新型制造工艺。与本领域的状态相比,通过注入机会在硅晶片上分配厚的电阻结构,这将降低制造过程复杂性。通过堆叠多层银镍结构,可以进一步改善夹持器的装置尺寸,驱动功率和变形。在本文中,微夹持器的电气和机械行为很好地表征。对于0.26A的施加电流,观察到每个臂的位移为310.6μm。致动器的最大功耗为400mW。制造的微夹具可以抓住直径为1.3mm的小球。

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