In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. Flowing liquid is injected as the evaluation of mass change detection performance of the device. The evaluated result shows consistent value with the actual mass. Self-oscillation experiment has been used for recording actual mass change based on the resonance frequency shift with flowing liquid using digital data logger. Minimum mass resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.
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