Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans

摘要

A fiber-optic confocal microendoscope with MEMS scanners for both lateral and axial scan is presented. The MEMS 3D scan engine achieves a lateral scan range of over ± 26° with a 2D MEMS mirror and a depth scan of over 400 μm with a 1D MEMS tunable lens. Both 2D and 3D confocal images of micro-particles and acute rat brain tissue have been obtained.