The confocal 3D measurement is a method in which only the relative light intensity values at the respective measurement positions are compared with each other to find the point at which the light intensity is the highest and the three-dimensional height value is converted. Therefore, If you want to measure the intensity of light more accurately only near the focal point where the intensity of the light is greatest without measuring the intensity of the light, and find the point with the greatest intensity of light, The amount of data from the sensor can be reduced. That is, the image sensor continuously measures the light intensity at a low frame rate level of several tens to several hundreds of frames without transmitting the image data measuring the light intensity of several thousand frames per second, The light intensity is measured at a high speed of several thousand frames per second from the entrance, and stored in the DRAM memory buffer of the image sensor. When it is determined that the light intensity is out of the maximum intensity interval, the operation is again executed in the low- And the data stored in the DRAM memory buffer of the image sensor is divided and transmitted so that the point of maximum light intensity is found in the control operation unit for performing the confocal three dimensional measurement. Thus, in the image sensor, Time that has been transmitted from the image sensor for By reducing the amount of image data, it is possible to reduce the cost of the image sensor itself and the manufacturing cost of the confocal 3D scanner using it without degrading the 3D (height value) measurement resolution.
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