ZNO NANOCOLUMNS ARRAYS FOR THIN FILM AMORPHOUS Si, TANDEM a-Si/a-Si AND a-Si/μc Si SOLAR CELLS

摘要

We report on hydrothermal growth of single (or multi)-crystalline ZnO nan°Columns arrays,perpendicularly oriented towards the TCO (transparent conductive oxide) substrate. In order to get well definedspacing and arrangement over the area, we used electron beam lithography. Vertically aligned ZnO nan°Columnswere grown in an aqueous solution of zinc nitrate hexahydrate and hexamethylenetetramine at 75÷95 ºC, with thegrowth rate 0.5÷1μm/h. The morphology of the nanostruct ures was visualized by scanning electron microscopy(Raith e-LiNE). The electrical, optical and surface properties of ZnO nan°Columns, which are decisive for a highsolar cell efficiency, were investigated by optical and photothermal spectroscopy. We will present our results onoptimization of nanostructured TCO/glass substrates being designed for very thin amorphous Si cells and for tandema-Si/a-Si and a-Si/micr°Crystalline Si solar cells and report on influence of hydrogen and oxygen plasma treatment.