A new method for eliminating cross axis sensitivity in two axis capacitive micromachined accelerometers

摘要

A novel two axis capacitive micromachined accelerometer is designed and simulated. Only a single seismic mass is employed for detecting the acceleration in both directions. Cross axis sensitivity between x axis (in-plane) and z axis (out-plane) has been eliminated. The accelerometer is designed for automotive applications with the Range of allowed acceleration in horizontal direction (x axis) of ±50g and vertical direction (z axis) of ±20g. Total structure dimension is 1.16mm×1mm×20μm.