Implementation of electrostatically controlled Fabry-Perot interferometer using nanoporous anodic aluminum oxide layer

摘要

This study presents the use of nanoporous anodic aluminum oxide (np-AAO) for Fabry-Perot interferometer (FPI). The merits of this np-AAO Fabry-Perot interferometer are as follows, (1) in-use stiction of the actuation np-AAO membrane can be reduced by the nanoporous textures, (2) dielectric charging can be largely reduced by np-AAO material in this study, thus the offset voltage of the polarities close to zero and hysteresis curves are symmetric [1], (3) driving (pull-in) voltage can be reduced due to superior dielectric constant (ε=7.05) of np-AAO [2], and (4) in addition, refractive index can be adjusted by pore size [3]. The tests demonstrate the performance of presented Fabry-Perot interferometer.