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Electrical Characterization of YSZ Thin Films Using a Calibrated Platinum Micro-electrode

机译:使用校准的铂微电极对YSZ薄膜进行电表征

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摘要

A bulk platinum microelectrode calibration method, aiming at providing reliable measurements of the electrical properties of thin solid electrolyte films, is described. The method consists in the determination of the electrically active surface of an electrode of microscopic dimensions based on the confident measurement of the conductivity of a well know reference sample. The method is demonstrated to be efficient, reliable and reproducible in the case of yttria-stabilized zirconia films prepared by different techniques for films thicknesses ranging from 1.5 μm to 10 μm.
机译:描述了一种块状铂微电极校准方法,旨在提供对固体电解质薄膜的电性能的可靠测量。该方法包括基于对公知参考样品的电导率的可靠测量来确定微观尺寸的电极的电活性表面。在通过不同技术制备的氧化钇稳定的氧化锆膜的膜厚范围为1.5μm至10μm的情况下,该方法被证明是有效,可靠和可重现的。

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