WELCOMING ELEMENTAL ANALYSIS OF NANOPARTICLES BY EDS IN COMBINATION WITH HIGH-RESOLUTION ELECTRON MICROSCOPY IN TRANSMISSION MODE

摘要

The analysis of the morphology of a specimen surface at the nanometre scale is a task easily resolved by means of a modern scanning electron microscope (SEM). Hence, parameters like shape, size and size distribution of nanoparticles can be evaluated accurately. For nanoparticles having a size below about 10 nm the task becomes challenging. Systematic work has recently demonstrated the metrological background of such an exercise. The approach making possible accurate and precise measurement of nanoparticles size (distribution) with a SEM is in fact an older one, namely the transmission mode in a SEM, the so-called T-SEM or TSEM but applied on a new class of samples, i.e., nanoparticles.