Cross-sections for the ionisation of inner-shell electrons by electron impact are needed for quantitative analysis by electron-probe microanalysis, surface analysis by Auger electron spectroscopy, and thin-film analysis by electron energy-loss spectroscopy. We have performed an analysis of measured and calculated cross-sections for inner-shell ionisation (and for X-ray production) as well as of cross-sections from a number of widely used predictive formulae. The emphasis in our analysis is on the recent formulation of the distorted-wave Born approximation (DWBA), which has been used to generate an extensive database of cross-sections for the ionisation of the K-shell and the L- and M-subshells of all elements from hydrogen to einsteinium (Z = 1 to Z = 99) by electrons and positrons with kinetic energies up to 1 GeV [Bote D, et al. (2009) At. Data Nucl. Data Tables 95 871); ibid. (2011) 97 186].
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