A Dicing study for highly productive micro production processes of porcelain-based ceramics for MEMS

摘要

Dicing still represents a main technology for separating or structuring hard and brittle materials. However, the high and frequent wear of machining tools (dicing blades) does not allow efficient machining. A new ceramic material and machining process are introduced to overcome this restriction. For this purpose, a porcelain-based ceramic is used. In its "green-state" (pre-sintcred), it is well suitable for machining. Conducting the sintering process post-machining achieves extremely hard and tough surface properties, and introduces a low shrinkage. This paper presents a dicing study for highly productive micro production processes of porcelain ceramics for MEMS. Structures with an aspect ratio (＜22:1) are achieved in green state with subsequent sintering with nearly no wear on the cutting tool.