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68 Atomic-Scale Modeling of Nanoscale Devices

机译:68纳米级器件原子尺度建模

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Even though the active components of semiconductor devices have been shrunk down radically over the past decade, to the point where certain feature sizes are in the range of 30–40 nm, the motion and behavior of electrons are still reasonably well described by semiclassical models--Ohm's law coupled with macroscopic electrostatic models, drift–diffusion equations, and so on. The number of carriers is still large enough that quantum fluctuations are averaged out statistically, and the materials involved can, for the most part, be characterized by bulk material parameters. In this domain, technology computer aided design (TCAD) models are an essential tool to model and predict the physical properties of device components.
机译:尽管半导体器件的活动成分在过去的十年中缩小了缩小,但是某些特征尺寸在30-40nm的范围内,电子的运动和行为仍然是通过半定类模型的合理描述的 - -ohm的定律与宏观静电模型,漂移 - 扩散方程等耦合。载流子的数量仍然足够大,以至于量子波动在统计上平均值,并且涉及的材料可以在大多数情况下以散装材料参数为特征。在该域中,技术计算机辅助设计(TCAD)模型是模拟和预测设备组件的物理性质的基本工具。

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